TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - MEMS and NEMS: systems, devices, and structures 
T2  - Nano- and microscience, engineering, technology, and medicine series
SN  - 0849312620
U1  - 621.381 
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Sistemas microelectromecánicos
ER  -