MEMS and NEMS : systems, devices, and structures /
Lyshevski, Sergey Edward,
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - 461 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series .
0849312620
Sistemas microelectromecánicos.
621.381 / L993m 2002
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - 461 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series .
0849312620
Sistemas microelectromecánicos.
621.381 / L993m 2002